上海羽辰电子科​​​​​技有限公司

  Shanghai Morn Technology Co., Ltd.


产品设备




上海羽辰电子科技有限公司是一家集半导体原材料研发和销售,设备销售和后期维护为一体的公司。本公司技术人员均有10年以上业内经验,竭诚为广大客户提供专业服务。

300mm lmplant E-chuck

8英寸,12英寸离子注入机之静电吸盘


Re-condition Service and Refurbish service:
AMAT:MCA
Varian:EHP500,and VIISta
Novellus:Speed
Polyimide chucks

Modification and Customization Service:
Convert polyimide E-chuck to ceramic E-chuck
Modify the polymer coating surface to dimple surface
Adding heating function into base
 

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8英寸,12英寸离子注入机之静电吸盘


Re-condition Service and Refurbish service:
AMAT:MCA
Varian:EHP500,and VIISta
Novellus:Speed
Polyimide chucks

Modification and Customization Service:
Convert polyimide E-chuck to ceramic E-chuck
Modify the polymer coating surface to dimple surface
Adding heating function into base
 

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